DocumentCode :
1072217
Title :
Laser annealing of copper alloy 510
Author :
Tice, E.
Author_Institution :
Western Electric Co.,Princeton, NJ, USA
Volume :
13
Issue :
9
fYear :
1977
fDate :
9/1/1977 12:00:00 AM
Firstpage :
813
Lastpage :
814
Keywords :
Annealing; Bonding; Copper alloys; Dielectric thin films; Interference; Machining; Optical pulses; Pulsed laser deposition; Silicon; Springs;
fLanguage :
English
Journal_Title :
Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
0018-9197
Type :
jour
DOI :
10.1109/JQE.1977.1069623
Filename :
1069623
Link To Document :
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