Title :
Laser annealing of copper alloy 510
Author_Institution :
Western Electric Co.,Princeton, NJ, USA
fDate :
9/1/1977 12:00:00 AM
Keywords :
Annealing; Bonding; Copper alloys; Dielectric thin films; Interference; Machining; Optical pulses; Pulsed laser deposition; Silicon; Springs;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1977.1069623