Title :
Interference effects in laser micromachining of thin film composite structures
Author_Institution :
Western Electric Co.,Princeton, NJ, USA
fDate :
9/1/1977 12:00:00 AM
Keywords :
Annealing; Bonding; Interference; Micromachining; Optical pulses; Phosphors; Springs; Testing; Thin film circuits; Transistors;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1977.1069625
