A revised process to increase efficiency and reproducibility in Cr-MIS solar cells

A new process has been introduced to improve both efficiency and reproducibility of Cr-MIS solar cells. Active area efficiencies of up to 13.2% have been measured for 2 cm²cells. These improvements are due to increased silicon surface cleanliness, an optimized interfacial oxide thickness, and a one pump-down vacuum process. Spectral response data correspond to measured Jscvalues and predict a reduced diffusion length of 64 µm in Wacker poly-Si caused by grain boundary effects.