Title :
Synthesis and evaluation of magnetic thin films
Author :
Zhou, Li ; Wigen, Philip E. ; Boyd, Edwin P. ; Deng, Haibin ; Shore, Sheldon G.
Author_Institution :
Ohio State Univ., Columbus, OH, USA
fDate :
11/1/1993 12:00:00 AM
Abstract :
A simple, economic chemical vapor deposition (CVD) method for the coating of substrates with high quality homogeneous thin metal films is developed. The physical and magnetic properties of these magnetic films are evaluated. The results show that the film quality achieved is equivalent to that of other techniques
Keywords :
X-ray diffraction examination of materials; chemical vapour deposition; cobalt; ferromagnetic properties of substances; iron; iron alloys; magnetic hysteresis; magnetic multilayers; magnetic thin films; ruthenium; ruthenium alloys; scanning electron microscope examination of materials; Auger electron spectroscopy; CVD method; Co; Co-Fe-Co; Co-Ru-Co; Fe; FeRu3; SEM; X-ray diffraction; X-ray photoelectron spectroscopy; economic chemical vapor deposition; ferromagnetic resonance; film quality; film synthesis; homogeneous thin metal films; magnetic hysteresis; magnetic multilayers; magnetic thin films; substrate coating; Chemical vapor deposition; Glass; Impurities; Iron; Magnetic films; Magnetic materials; Scanning electron microscopy; Steel; Substrates; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
