Optical microelectromechanical system array for free-space retrocommunication

Author

Luo, Changping ; Goossen, K.W.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Delaware, Newark, DE, USA

Volume

16

Issue

9

fYear

2004

Firstpage

2045

Lastpage

2047

Abstract

We demonstrate here an optical link for free-space retrocommunication based on an optical microelectromechanical system array with a structure of mechanically active antireflection switch using a thin Si₃N₄ membrane. The array consists of 215 identical single devices with a total active area of 36 mm² and was fabricated with the normal surface sacrificial micromachining. An overfilled reflectance contrast of 3 dB was observed at 6328 Å and a data rate of 100 kb/s shown in 50 mtorr vacuum. A design tradeoff between the high optical filling factor and the high working frequency is discussed.

Keywords

micro-optics; micromachining; micromechanical devices; optical arrays; optical fabrication; optical links; optical switches; reflectivity; 100 kbit/s; 50 mtorr; free-space retrocommunication; mechanically active antireflection switch; normal surface sacrificial micromachining; optical filling factor; optical link; optical microelectromechanical system array; reflectance; thin Si₃N₄ membrane; Biomembranes; Filling; Frequency; Microelectromechanical systems; Micromachining; Optical arrays; Optical design; Optical fiber communication; Optical switches; Reflectivity;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2004.831947

Filename

1325227