• DocumentCode
    1072860
  • Title

    Corrections to "A high resolution negative electron resist by image reversal"

  • Author

    Oldham, W.G. ; Hieke, E.

  • Author_Institution
    Siemens AG, Research Laboratories, Munich, Germany
  • Volume
    1
  • Issue
    11
  • fYear
    1980
  • Firstpage
    244
  • Lastpage
    244
  • Abstract
    A corrected figure 3 is presented for the above-named work (ibid., Vol. EDL-I, No. 10, October 1980).
  • Keywords
    Electrons; Image resolution; Resists;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1980.25305
  • Filename
    1481167
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1072860