Title :
Load characteristics of a spiral coil type thin film microtransformer
Author :
Yamaguchi, K. ; Sugawara, E. ; Nakajima, O. ; Matsuki, H. ; Murakami, K.
Author_Institution :
Amorphous Magnetic Device Lab., Sendai, Japan
fDate :
11/1/1993 12:00:00 AM
Abstract :
A spiral coil type thin film microtransformer with a size of 2.4×3.1 mm2 is fabricated using photolithography techniques for application in megahertz region switching regulators. An amorphous magnetic film of a multilayered CoNbZr/SiO2 is used as a magnetic core. Load characteristics are measured at 10 MHz. A comparatively high efficiency of 67% and an acceptable excitation current of 25 mA are obtained, in spite of the small size of the microtransformer
Keywords :
coils; magnetic multilayers; magnetic thin film devices; transformer cores; transformers; 10 MHz; 25 mA; 67 percent; CoNbZr-SiO2; CoNbZr/SiO2 multilayer; amorphous magnetic film; load characteristics; magnetic core; megahertz region switching regulators; photolithography; spiral coil type; thin film microtransformer; Coils; Insulation; Lithography; Magnetic cores; Magnetic field measurement; Magnetic films; Resists; Spirals; Thin film circuits; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on
