Application of thin-film inductors to LC filters

Author

Yamaguchi, M. ; Ishihara, K. ; Arai, K.I.

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

Volume

29

Issue

6

fYear

1993

fDate

11/1/1993 12:00:00 AM

Firstpage

3222

Lastpage

3224

Abstract

The application of thin film inductors to thin film based LC filters is discussed. The trial monolithic thin film LC filter consists of thin film inductors and thin film capacitors, fabricated by RF sputtering and ion-milling techniques. This filter is a second-order low pass filter with a cutoff frequency of 50 MHz. Two kinds of filters are fabricated, using a nonmagnetic thin film inductor on a magnetic thin film inductor. It is proved that magnetic thin film permits the reduction of the size and the insertion loss of the filter

Keywords

inductors; low-pass filters; magnetic thin film devices; radiofrequency filters; 50 MHz; LC filters; RF sputtering; cutoff frequency; insertion loss reduction; ion-milling; magnetic thin film inductor; monolithic thin film; nonmagnetic thin film inductor; second-order low pass filter; size reduction; thin film capacitors; thin-film inductors; two-part device; Electrical resistance measurement; Frequency; Impedance; Low pass filters; Magnetic films; Magnetic separation; Sputtering; Thin film inductors; Transmission line measurements; Wavelength measurement;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.281143

Filename

281143