Title :
Application of thin-film inductors to LC filters
Author :
Yamaguchi, M. ; Ishihara, K. ; Arai, K.I.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
11/1/1993 12:00:00 AM
Abstract :
The application of thin film inductors to thin film based LC filters is discussed. The trial monolithic thin film LC filter consists of thin film inductors and thin film capacitors, fabricated by RF sputtering and ion-milling techniques. This filter is a second-order low pass filter with a cutoff frequency of 50 MHz. Two kinds of filters are fabricated, using a nonmagnetic thin film inductor on a magnetic thin film inductor. It is proved that magnetic thin film permits the reduction of the size and the insertion loss of the filter
Keywords :
inductors; low-pass filters; magnetic thin film devices; radiofrequency filters; 50 MHz; LC filters; RF sputtering; cutoff frequency; insertion loss reduction; ion-milling; magnetic thin film inductor; monolithic thin film; nonmagnetic thin film inductor; second-order low pass filter; size reduction; thin film capacitors; thin-film inductors; two-part device; Electrical resistance measurement; Frequency; Impedance; Low pass filters; Magnetic films; Magnetic separation; Sputtering; Thin film inductors; Transmission line measurements; Wavelength measurement;
Journal_Title :
Magnetics, IEEE Transactions on
