Title :
Soft magnetic properties of sputtered Co-Fe-Ta-N films
Author :
Iwasaki, H. ; Ohsawa, Y. ; Akashi, R. ; Ohta, T.
Author_Institution :
Toshiba Res. & Dev. Center, Kawasakishi, Japan
fDate :
11/1/1993 12:00:00 AM
Abstract :
The authors report that the addition of Fe improved the soft magnetic properties of sputtered Co-Ta-N films. A bcc phase appeared accompanying a change in microstructure as the Fe content increased to 9 at.%. After annealing up to 700°C, (Co83Fe9Ta 8)-N films showed a magnetic saturation flux density of 1.6 T, a coercivity (Hc) of less than 25 A/m, and a permeability of 3000. Well-crystallized and hcp (001) orientated Co-Fe-Te films without nitrogen also showed a low Hc of less than 80 A/m, suggesting that the addition of Fe suppressed the large magnetocrystalline anisotropy of hcp phase Co-based films
Keywords :
annealing; cobalt alloys; coercive force; ferromagnetic properties of substances; iron alloys; magnetic anisotropy; magnetic permeability; magnetic thin films; metallic thin films; sputtered coatings; tantalum alloys; 1.6 T; Co83Fe9Ta8-N films; Fe content; annealing; bcc phase; coercivity; hcp phase Co-based films; magnetic saturation flux density; magnetocrystalline anisotropy; microstructure; permeability; soft magnetic properties; sputtered Co-Fe-Ta-N films; Annealing; Iron; Magnetic anisotropy; Magnetic films; Magnetic flux; Magnetic properties; Microstructure; Perpendicular magnetic anisotropy; Saturation magnetization; Soft magnetic materials;
Journal_Title :
Magnetics, IEEE Transactions on
