Title :
Microstructures and soft magnetic properties of sputtered FeSiAlRuTi films
Author :
Lin, J.C. ; Chen, L.J. ; Tseng, M.R. ; Chen, C.J.
Author_Institution :
Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fDate :
11/1/1993 12:00:00 AM
Abstract :
The soft magnetic properties and microstructure changes in FeSiAlRuTi films due to post annealing treatments were investigated. It was found that the decrease of coercivity and increase of permeability of the films by annealing treatment are correlated to the reduction of dislocation density and formation of DO3 superlattice, rather than the grain coarsening or preferred orientation
Keywords :
aluminium alloys; annealing; coercive force; crystal microstructure; dislocation density; ferromagnetic properties of substances; iron alloys; magnetic permeability; magnetic thin films; ruthenium alloys; silicon alloys; sputtered coatings; titanium alloys; DO3 superlattice; FeSiAlRuTi; coercivity; dislocation density; microstructure changes; permeability; post annealing treatments; soft magnetic properties; sputtered FeSiAlRuTi films; Annealing; Coercive force; Magnetic films; Magnetic properties; Microstructure; Permeability; Saturation magnetization; Soft magnetic materials; Sputtering; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on
