DocumentCode
1074063
Title
Low-loss Na-glass waveguides
Author
SoporI, Bhushan L. ; Chang, William S C
Author_Institution
Motorola Corporation, Phoenix, AZ, USA
Volume
14
Issue
5
fYear
1978
fDate
5/1/1978 12:00:00 AM
Firstpage
323
Lastpage
325
Abstract
A new method for the fabrication of low-loss Na-glass waveguides on SiO2 has been found. The reglassification process has enabled us to reduce the scattering loss in the planar waveguide to less than 1 dB/cm and to obtain channel waveguide with 2 dB/cm attenuation by the lift-off method or by the direct laser writing method.
Keywords
Fabrication; Glass; Optical attenuators; Optical planar waveguides; Optical waveguides; Planar waveguides; Refractive index; Silicon compounds; Sputtering; Temperature;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1978.1069802
Filename
1069802
Link To Document