Title :
Low-loss Na-glass waveguides
Author :
SoporI, Bhushan L. ; Chang, William S C
Author_Institution :
Motorola Corporation, Phoenix, AZ, USA
fDate :
5/1/1978 12:00:00 AM
Abstract :
A new method for the fabrication of low-loss Na-glass waveguides on SiO2has been found. The reglassification process has enabled us to reduce the scattering loss in the planar waveguide to less than 1 dB/cm and to obtain channel waveguide with 2 dB/cm attenuation by the lift-off method or by the direct laser writing method.
Keywords :
Fabrication; Glass; Optical attenuators; Optical planar waveguides; Optical waveguides; Planar waveguides; Refractive index; Silicon compounds; Sputtering; Temperature;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1978.1069802
