Title :
Integrated high-temperature piezoelectric plate acoustic wave transducers using mode conversion
Author :
Wu, Kuo-Ting ; Kobayashi, Makiko ; Jen, Cheng-Kuei
Author_Institution :
Dept. of Electr. & Comput. Eng., McGill Univ., Montreal, QC
fDate :
6/1/2009 12:00:00 AM
Abstract :
Piezoelectric thick (>66 mum) films have been directly coated onto aluminum (Al) substrates using a sol-gel spray technique. With top electrode, these films serve as integrated ultrasonic transducers (IUT), which normally operate as thickness longitudinal wave transducers. When such IUT are located at the edges of the metallic plates, they can excite and detect symmetrical, antisymmetric and shear horizontal types of plate acoustic waves (PAW) using mode conversion methods. In 2 mm thick Al plates, 2 line defects of 1 mm width and 1 mm depth were clearly detected at temperatures up to 150degC in pulse-echo mode. Results indicated that, for 2 mm thick aluminum plates, shear horizontal PAW were the best for the line defect detection. Also, the experimental results agree well with those obtained by a finite-difference-based method.
Keywords :
condition monitoring; flaw detection; high-temperature techniques; piezoelectric materials; plates (structures); sol-gel processing; structural acoustics; structural engineering; thick film devices; ultrasonic materials testing; ultrasonic transducers; Al; depth 1 mm; integrated high-temperature transducer; integrated ultrasonic transducer; line defect detection; metallic plates; mode conversion; piezoelectric plate acoustic wave transducer; piezoelectric thick film; plate acoustic waves; pulse-echo mode; shear horizontal PAW; size 1 mm; size 2 mm; sol-gel spray technique; Acoustic signal detection; Acoustic transducers; Acoustic waves; Aluminum; Electrodes; Piezoelectric films; Piezoelectric transducers; Plasma welding; Spraying; Ultrasonic transducers; Acoustics; Computer-Aided Design; Equipment Design; Equipment Failure Analysis; Membranes, Artificial; Micro-Electrical-Mechanical Systems; Reproducibility of Results; Sensitivity and Specificity; Systems Integration; Temperature; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2009.1163