Title :
Surface acoustic wave properties of (100) AIN films on diamond with different IDT positions
Author :
Lin, Zhi-Xun ; Wu, Sean ; Ro, Ruyen ; Lee, Maw-Shung
Author_Institution :
Dept. of Electron. Eng., Nat. Kaohsiung Univ. of Appl. Sci., Kaohsiung
fDate :
6/1/2009 12:00:00 AM
Abstract :
(100)AlN films have better surface acoustic wave (SAW) properties than (002) AlN films. In this research, (100) AlN films were combined with diamonds as a new composite SAW substrate. The SAW properties of (100) AlN films on diamonds were analyzed with 4 composite structures: interdigital transducer (IDT)/(100)AlN/diamond, (100)AlN/IDT/diamond, IDT/(100)AlN/metal/diamond, and metal/IDT/(100) AlN/diamond, and they exhibited some excellent SAW properties. Our research results provide a predictable and theoretical basis for further application on high-velocity SAW devices.
Keywords :
III-V semiconductors; Rayleigh waves; aluminium compounds; diamond; interdigital transducers; semiconductor thin films; surface acoustic wave transducers; surface acoustic waves; wide band gap semiconductors; AlN-C; C; Rayleigh SAW modes propagation; diamond; high-velocity SAW device; interdigital transducer; surface acoustic wave properties; thin films; Acoustic transducers; Acoustic waves; Surface acoustic wave devices; Surface acoustic waves; Acoustics; Aluminum Compounds; Computer-Aided Design; Diamond; Equipment Design; Equipment Failure Analysis; Reproducibility of Results; Scattering, Radiation; Sensitivity and Specificity; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2009.1166
