Title :
Oxidation of seed-layer for improved magnetic and recording performance of thin-film rigid discs
Author :
Mahvan, Nader ; Ziera, Eitan ; Eltoukhy, Atef
Author_Institution :
Nashua Comput. Products, Santa Clara, CA, USA
fDate :
11/1/1993 12:00:00 AM
Abstract :
The effect of oxidation of various seed layers for longitudinal media is described. Sputtered Ni3P exposed to controlled quantities of atmospheric gas and sputtering seed layers of Ti and Cr in an atmosphere of oxygen and argon are described. An appreciable increase of the coercivity and the coercivity squareness was observed. The observed improvements were attributed to the presence of an oxide layer that formed on the surface of the sputtered films as a result of oxidation. This oxidation was shown to affect the microstructure of the deposits, the more significant of which is narrowing of the grain size distribution of the subsequent layers. To a lesser extent, the seed layers seem to reduce the average grain size of the subsequent deposits
Keywords :
Auger effect; X-ray diffraction examination of materials; chromium; chromium alloys; cobalt alloys; coercive force; hard discs; magnetic multilayers; magnetic recording; magnetic thin film devices; magnetisation; nickel compounds; oxidation; platinum alloys; sputter deposition; titanium; Ar-O2; CoCr13Pt8-Cr-Cr; CoCr13Pt8-Cr-NiP3; CoCr13Pt8-Cr-Ti; X-ray diffraction; atmospheric gas; coercivity squareness; grain size distribution; longitudinal media; magnetic recording; microstructure; multilayer thin films; recording performance; scanning Auger spectroscopy; seed layer oxidation; sputtered films; thin-film rigid discs; Amorphous magnetic materials; Chromium; Coercive force; Disk recording; Magnetic films; Magnetic properties; Magnetic recording; Magnetic separation; Oxidation; Saturation magnetization;
Journal_Title :
Magnetics, IEEE Transactions on
