Sputtering of high coercivity/low noise CoCrTa bilayered hard disks in a manufacturing system

Author

Cord, B. ; Schuller, K.H. ; Zahel, H. ; Chaput, G. ; Duan, S.

Author_Institution

Leybold AG, Hanau, Germany

Volume

29

Issue

6

fYear

1993

fDate

11/1/1993 12:00:00 AM

Firstpage

3694

Lastpage

3696

Abstract

The magnetic properties and recording performance of mono- and symmetrically bilayered Cr-CoCrTa layer stacks are compared. The media coercivity changes drastically at thin intermediate Cr thicknesses d with a d^-0.74 dependence between 1 and 5 nm and a monotonic increase at d greater than 5 nm. The media noise is reduced by 4-5 dB at very thin intermediate Cr, the M-H loop is square and PW₅₀ values are the same for mono- and bilayered films. The stability of the process was investigated and the manufacturing of disks was demonstrated in a production sputtering system

Keywords

X-ray diffraction examination of materials; chromium; chromium alloys; cobalt alloys; coercive force; hard discs; magnetic hysteresis; magnetic recording; magnetic thin film devices; sputter deposition; tantalum alloys; Cr-CoCr₁₂Ta₂; M-H loop; PW₅₀ values; X-ray diffraction; bilayered hard disks; coercivity; disc manufacture; hysteresis loops; magnetic properties; manufacturing system; media coercivity; media noise; monolayered hard disc; recording performance; sputtering system; Chromium; Coercive force; Disk recording; Hard disks; Magnetic noise; Magnetic properties; Magnetic recording; Noise reduction; Sputtering; Stability;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.281272

Filename

281272