Title :
Design and Fabrication of S0 Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators
Author :
Renyuan Wang ; Bhave, Sunil A. ; Bhattacharjee, Kushal
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
Commercial markets desire integrated multifrequency band-select duplexer and diplexer filters with a wide fractional bandwidth and steep roll-off to satisfy the ever-increasing demand for spectrum. In this paper, we discuss the fabrication and design of lithium niobate (LN) thin-film S0 Lamb-wave resonators on a piezoelectric-on-piezoelectric platform. Filters using these resonators have the potential to fulfill all the above requirements. In particular, we demonstrated one-port high-order S0 Lamb-wave resonators with resonant frequencies from ~400 MHz to ~1 GHz on a black rotated y-136 cut LN thin film. The effective electromechanical coupling factor (k2eff ) ranges from 7% to 12%, while the measured quality factor ranges from 600 to 3300. The highest k2eff × Q achieved on this chip is 194, significantly surpassing contour mode resonators manufactured in other technologies.
Keywords :
lithium compounds; micromechanical resonators; piezoelectric devices; surface acoustic wave resonators; LiNbO3; S0 Lamb-wave thin-film lithium niobate micromechanical resonators; contour mode resonators; effective electromechanical coupling factor; piezoelectric-on-piezoelectric platform; Couplings; Crystals; Electrodes; Fabrication; III-V semiconductor materials; Q-factor; Resonant frequency; Lamb wave; TCF; electro-mechanical coupling factor; laterally vibrating resonators; lithium niobate; piezoelectric; quality factor; wideband RF filtering; wideband RF filtering.;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2014.2384916
