Title :
APFIM studies of compositional inhomogeneity in sputtered Co-Cr thin films
Author :
Hono, K. ; Maeda, Y. ; LI, J-L. ; Sakurai, T.
Author_Institution :
Inst. of Mater. Res., Tohoku Univ., Sendai, Japan
fDate :
11/1/1993 12:00:00 AM
Abstract :
Atom probe analysis results of Co-22 at.% Cr bulk alloy and its thin films are presented. While no compositional inhomogeneity is detected from the bulk sample, a significant compositional fluctuation is present in the thin film specimen which is sputter deposited on a heated substrate. The concentration of the Cr enriched region is in the range of 30-40 at.% Cr, while that of the Cr depleted region is approximately 5 at.% Cr. Such compositional fluctuations are present within a grain. These results are in agreement with nuclear magnetic resonance (NMR) and transmission electron microscopy (TEM) results
Keywords :
atom probe field ion microscopy; chromium alloys; cobalt alloys; grain boundary segregation; magnetic thin films; sputter deposition; sputtered coatings; APFIM studies; Co-Cr films; compositional inhomogeneity; heated substrate; magnetic thin films; phase separation; sputter deposited; Atomic layer deposition; Atomic measurements; Chromium; Fluctuations; Magnetic analysis; Magnetic films; Nuclear magnetic resonance; Probes; Sputtering; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on
