Title :
Planar lightwave circuit platform with coplanar waveguide for opto-electronic hybrid integration
Author :
Mino, S. ; Yoshino, K. ; Yamada, Y. ; Terui, T. ; Yasu, M. ; Moriwaki, K.
Author_Institution :
NTT Opto-Electron. Labs., Ibaraki, Japan
fDate :
12/1/1995 12:00:00 AM
Abstract :
We propose a planar lightwave circuit (PLC) platform constructed on a silica-on-terraced-silicon (STS) substrate for opto-electronic hybrid integration. This platform consists of an embedded silica PLC region, a terraced silicon region for optical device assembly, and a high-speed electrical circuit region. In the electrical circuit region, the coplanar waveguides (CPW) are prepared on a thick-silica/silicon substrate. This structure reduces the propagation loss of the CPW drastically to 2.7 dB/cm at 10 GHz, because the loss tangent (tan δ) of the dielectric constants of silica is much smaller than that of silicon. In order to study the feasibility of this PLC-platform for multi-gigabit operation, we used it to fabricate an LD module in which an LD chip and LD-driver integrated circuits (IC) are assembled on the PLC-platform. A bit error rate measurement of this LD module in a 2.5 Gb/s NRZ showed that this platform is applicable to multi-gigabit optical signal processing
Keywords :
coplanar waveguides; driver circuits; hybrid integrated circuits; integrated optoelectronics; optical information processing; optical losses; optical planar waveguides; permittivity; semiconductor lasers; substrates; waveguide lasers; 2.5 Gbit/s; LD chip; LD module; LD-driver; SiO2-Si; bit error rate measurement; coplanar waveguide; coplanar waveguides; dielectric constants; embedded silica PLC region; high-speed electrical circuit region; loss tangent; multi-gigabit operation; multi-gigabit optical signal processing; optical device assembly; opto-electronic hybrid integration; planar lightwave circuit; planar lightwave circuit platform; propagation loss; silica-on-terraced-silicon substrate; terraced silicon region; thick-silica/silicon substrate; Assembly; Circuits; Coplanar waveguides; Optical planar waveguides; Optical signal processing; Optical waveguides; Planar waveguides; Programmable control; Propagation losses; Silicon compounds;
Journal_Title :
Lightwave Technology, Journal of
