DocumentCode
1075369
Title
A model for conduction in polycrystalline silicon—Part I: Theory
Author
Mandurah, Mohammad M. ; Saraswat, Krishna C. ; Kamins, Theodore I.
Author_Institution
Integrated Circuits Laboratory, Stanford, CA
Volume
28
Issue
10
fYear
1981
fDate
10/1/1981 12:00:00 AM
Firstpage
1163
Lastpage
1171
Abstract
A new phenomenological model for the electrical conduction in polycrystalline silicon is developed. The combined mechanisms of dopant segregation, carrier trapping, and carrier reflection at grain boundaries are proposed to explain the electrical conduction in polycrystalline silicon. The grain boundaries are assumed to behave as an intrinsic wide-band-gap semiconductor forming a heterojunction with the grains. Thermionic emission over the potential barriers created within the grains due to carrier trapping at the grain boundaries and then tunneling through the grain boundaries is proposed as the carrier transport mechanism. A generalized current-voltage relationship is developed which shows that the electrical properties of polycrystalline silicon depend on the properties of the grain boundaries.
Keywords
Conductivity; Crystallization; Grain boundaries; Heterojunctions; Optical films; Optical reflection; Semiconductor films; Semiconductor process modeling; Silicon; Thermionic emission;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1981.20504
Filename
1481656
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