• DocumentCode
    1075369
  • Title

    A model for conduction in polycrystalline silicon—Part I: Theory

  • Author

    Mandurah, Mohammad M. ; Saraswat, Krishna C. ; Kamins, Theodore I.

  • Author_Institution
    Integrated Circuits Laboratory, Stanford, CA
  • Volume
    28
  • Issue
    10
  • fYear
    1981
  • fDate
    10/1/1981 12:00:00 AM
  • Firstpage
    1163
  • Lastpage
    1171
  • Abstract
    A new phenomenological model for the electrical conduction in polycrystalline silicon is developed. The combined mechanisms of dopant segregation, carrier trapping, and carrier reflection at grain boundaries are proposed to explain the electrical conduction in polycrystalline silicon. The grain boundaries are assumed to behave as an intrinsic wide-band-gap semiconductor forming a heterojunction with the grains. Thermionic emission over the potential barriers created within the grains due to carrier trapping at the grain boundaries and then tunneling through the grain boundaries is proposed as the carrier transport mechanism. A generalized current-voltage relationship is developed which shows that the electrical properties of polycrystalline silicon depend on the properties of the grain boundaries.
  • Keywords
    Conductivity; Crystallization; Grain boundaries; Heterojunctions; Optical films; Optical reflection; Semiconductor films; Semiconductor process modeling; Silicon; Thermionic emission;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1981.20504
  • Filename
    1481656