DocumentCode
1075473
Title
I-1 performance comparison of MOSLSI built using bulk and SOS technology
Author
Sun, E.
Volume
28
Issue
10
fYear
1981
fDate
10/1/1981 12:00:00 AM
Firstpage
1207
Lastpage
1208
Keywords
Annealing; CMOS technology; Electron traps; Isolation technology; Large scale integration; MOS devices; Silicon devices; Solid lasers; Solid state circuits; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1981.20514
Filename
1481666
Link To Document