Title :
Optimization of Structure of Large Format TES Arrays
Author :
Yoshitake, H. ; Ezoe, Y. ; Yoshino, T. ; Mukai, K. ; Ishikawa, K. ; Mitsuda, K. ; Yamasaki, N.Y. ; Ishisaki, Y. ; Akamatsu, H. ; Maeda, R. ; Takano, T.
Author_Institution :
Inst. of Space & Astronaut. Sci., Japan Aerosp. Exploration Agency (ISAS/JAXA), Sagamihara, Japan
fDate :
6/1/2009 12:00:00 AM
Abstract :
We fabricated 16 times 16 format arrays of 180 mum square Ti/Au superconducting transition edge X-ray microcalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.
Keywords :
calorimeters; gold; microsensors; sputter etching; superconducting devices; titanium; large format TES arrays; superconducting transition edge X-ray microcalorimeters; thermal link; transition temperatures; Transition edge sensor; x-ray microcalorimeter;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2009.2019227
