• DocumentCode
    1075532
  • Title

    Optimization of Structure of Large Format TES Arrays

  • Author

    Yoshitake, H. ; Ezoe, Y. ; Yoshino, T. ; Mukai, K. ; Ishikawa, K. ; Mitsuda, K. ; Yamasaki, N.Y. ; Ishisaki, Y. ; Akamatsu, H. ; Maeda, R. ; Takano, T.

  • Author_Institution
    Inst. of Space & Astronaut. Sci., Japan Aerosp. Exploration Agency (ISAS/JAXA), Sagamihara, Japan
  • Volume
    19
  • Issue
    3
  • fYear
    2009
  • fDate
    6/1/2009 12:00:00 AM
  • Firstpage
    456
  • Lastpage
    459
  • Abstract
    We fabricated 16 times 16 format arrays of 180 mum square Ti/Au superconducting transition edge X-ray microcalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.
  • Keywords
    calorimeters; gold; microsensors; sputter etching; superconducting devices; titanium; large format TES arrays; superconducting transition edge X-ray microcalorimeters; thermal link; transition temperatures; Transition edge sensor; x-ray microcalorimeter;
  • fLanguage
    English
  • Journal_Title
    Applied Superconductivity, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1051-8223
  • Type

    jour

  • DOI
    10.1109/TASC.2009.2019227
  • Filename
    5075610
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1075532