Title :
Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures
Author :
Kim, J.-M. ; Hyeon, I.-J. ; Cho, K. ; Lee, H.-J. ; Kim, Y.K. ; Chung, T.-K. ; Kim, H.-S. ; Baek, C.-W.
Author_Institution :
Seoul Nat. Univ., Seoul
Abstract :
A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever.
Keywords :
atomic force microscopy; bending; cantilevers; mechanical testing; micromechanical devices; thin film devices; MEMS structures; atomic force microscope; mechanical tests; micromachined gold thin film strip specimens; silicon micromachined diamond-shaped AFM cantilever; uniform bending test;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20083091
