• DocumentCode
    1075645
  • Title

    Fe-implantation for rear-facet coatings of InP-based quantum cascade lasers

  • Author

    Wienold, M. ; Semtsiv, M.P. ; Dressler, S. ; Masselink, W.T. ; Potzger, K. ; Winnerl, S. ; Helm, M.

  • Author_Institution
    Humboldt Univ. Berlin, Berlin
  • Volume
    44
  • Issue
    4
  • fYear
    2008
  • Firstpage
    293
  • Lastpage
    294
  • Abstract
    Fe-implantation is used to create a high-resistivity layer at the rear facet of an InP-based quantum cascade laser (lambda = 3.9 mum), subsequently coated with a metallisation of Cr (5 nm) and Au (200 nm). The coatings lead to a 3.7-fold increase of front-facet power and a 20-30% reduction in threshold current density compared to uncoated lasers.
  • Keywords
    III-V semiconductors; chromium; coating techniques; gold; indium compounds; iron; metallisation; quantum cascade lasers; Au; Cr; Fe; InP; coated laser; high-resistivity layer; iron implantation; metallisation; quantum cascade lasers; rear-facet coatings;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20083589
  • Filename
    4455416
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1075645