Title :
IIIB-1 Electrical characteristics of small geometry MOSFETs with a bird´s-beak free and fully recessed isolation structure
Author :
Chiu, K.Y. ; Manoliu, J. ; Moll, Jonas
fDate :
10/1/1981 12:00:00 AM
Keywords :
Electric variables; Etching; Geometry; Isolation technology; MOS devices; MOSFETs; Oxidation; Plasma applications; Silicon; Very large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1981.20542
