DocumentCode :
1075776
Title :
Fabricating narrow and trapezoidal main poles for single-pole-type heads
Author :
Okada, Tomohiro ; Kimura, Hisashi ; Nunokawa, Isao ; Yoshida, Nobuo ; Etoh, Kimitoshi ; Fuyama, Moriaki
Author_Institution :
R&D Group, Hitachi Ltd., Kanagawa, Japan
Volume :
40
Issue :
4
fYear :
2004
fDate :
7/1/2004 12:00:00 AM
Firstpage :
2329
Lastpage :
2331
Abstract :
We investigated the fabrication processes used for perpendicular recording heads. To solve the problem of side write/erase on adjacent tracks, it is necessary to develop a trapezoidal main pole for single-pole-type heads. We therefore proposed a fabrication process using ion milling and an alumina hard mask for a sputtered film. We successfully made a narrow (120-nm wide) trapezoidal main pole using the process. The beveled angle of the pole depended on both the throat height and the angle at the flare point. When the flare point angle was 90°, the beveled angles of the trapezoid were about 10°. Evaluation data confirmed that perpendicular recording heads with a trapezoidal main pole solved the side write/erase problem.
Keywords :
magnetic heads; magnetic monopoles; perpendicular magnetic recording; sputter etching; 120 nm; adjacent tracks; alumina hard mask; etching; fabrication processes; flare point angle; ion milling; magnetic heads; narrow main poles; perpendicular magnetic recording; perpendicular recording heads; side write-erase problem; single-pole-type heads; sputtered film; throat height; trapezoidal main poles; Fabrication; Helium; Magnetic films; Magnetic heads; Milling; Perpendicular magnetic recording; Resists; Shape control; Sputter etching; Sputtering; Etching; magnetic heads; perpendicular magnetic recording; sputtering;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2004.830215
Filename :
1325494
Link To Document :
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