Title :
VIA-1 focused-ion-beam processes for device fabrication
Author :
Kubena, R.L. ; Anderson, C. Lindsay
fDate :
10/1/1981 12:00:00 AM
Keywords :
Chemical lasers; Etching; Fabrication; Gallium arsenide; Gas lasers; Gold; Laboratories; Resists; Sea measurements; Sea surface;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1981.20582
