Title :
High magnification unstable resonator excimer laser
Author :
James, D. ; McKee, Terrence J. ; Skrlac, Walter
Author_Institution :
Lumonics Research Limited, Ontario, Canada
fDate :
5/1/1979 12:00:00 AM
Abstract :
High brightness performance has been achieved in a UV preionized transverse discharge KrF excimer laser by using a high magnification unstable resonator configuration. The properties of laser brightness as a function of resonator magnification are examined.
Keywords :
Noble-gas lasers; Energy measurement; Laser beams; Laser feedback; Laser modes; Mirrors; Monitoring; Optical feedback; Optical pulses; Optical resonators; Shape measurement;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1979.1070014
