• DocumentCode
    1076543
  • Title

    High resolution techniques for the fabrication of small area Josephson tunnel junctions

  • Author

    Hu, Evelyn L. ; Jackel, Lawrence D. ; Howard, Richard E.

  • Author_Institution
    Bell Laboratories, Holmdel, NJ
  • Volume
    28
  • Issue
    11
  • fYear
    1981
  • fDate
    11/1/1981 12:00:00 AM
  • Firstpage
    1382
  • Lastpage
    1385
  • Abstract
    Superconducting tunnel junction devices as small as 10-10cm2have been made using novel self-aligning techniques in conjunction with optical or e-beam lithography. This process has been used to fabricate complete circuits and multijunction arrays under well controlled conditions, using a single resist patterning step.
  • Keywords
    Counting circuits; Electrodes; High speed optical techniques; Lithography; Optical device fabrication; Optical films; Optical interferometry; Optical sensors; Resists; Substrates;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1981.20618
  • Filename
    1481770
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1076543