Title :
Understanding the MOD Process Between Decomposition and YBCO Formation
Author :
Wesolowski, D.E. ; Yoshizumi, M. ; Cima, M.J.
Author_Institution :
Massachusetts Inst. of Technol., Cambridge
fDate :
6/1/2007 12:00:00 AM
Abstract :
This paper reviews the application of trifluoroacetate (TFA)-based metalorganic deposition (MOD) for the production of thin film YBCO superconductors. A brief review of relevant studies leading to modern processing techniques is followed by a description of the present understanding of chemical and physical changes between decomposition and YBCO formation.
Keywords :
MOCVD; high-temperature superconductors; superconducting thin films; yttrium compounds; YBCO decomposition; YBCO formation; YBCO superconducting film; YBa2Cu3O7; thin film growth; trifluoroacetate-based metalorganic deposition; Chemical processes; Heat treatment; Helium; High temperature superconductors; Production; Sputtering; Superconducting films; Superconducting thin films; Superconductivity; Yttrium barium copper oxide; ${rm YBa}_{2}{rm Cu}_{3}{rm O}_{7-{rm x}}$; High temperature superconductors; MOD; metal organic deposition;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2007.899416
