DocumentCode
1076814
Title
Ku -band flat-profile Si-IMPATT diodes with 10-percent efficiency
Author
Leistner, D. ; Freyer, J.
Author_Institution
Technische Universität München, München, Federal Republic of Germany
Volume
28
Issue
12
fYear
1981
fDate
12/1/1981 12:00:00 AM
Firstpage
1553
Lastpage
1554
Abstract
The fabrication of n-type high-efficiency Si flat-profile IMPATT diodes for Ku -band frequencies is described. By variation of the length of the undepleted region, the use of low ohmic contacts, and the reduction of the substrate thickness an efficiency of more than 10 percent could be obtained.
Keywords
Diodes; Etching; Fabrication; Frequency; Gallium arsenide; Gold; Ohmic contacts; Packaging; Substrates; Wire;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1981.20644
Filename
1481796
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