DocumentCode
1077041
Title
High resistivity interfacial layers due to compensation by Sulfur in (Al,Ga)As devices
Author
Anthony, P.J. ; Schumaker, N.E. ; Zilko, J.L.
Author_Institution
Bell Laboratories, Murray Hill, NJ, USA
Volume
2
Issue
2
fYear
1981
fDate
2/1/1981 12:00:00 AM
Firstpage
46
Lastpage
49
Abstract
In p-n junctions grown by LPE in the (Al,Ga)As system, high concentrations of Sulfur can accumulate on the p side of the junction. As a result, a closely compensated, high resistivity region can extend for 0.1-1.0 µm into the p layer. Since sulfur creates deep electron traps in Al0.4 Ga0.6 As with a thermal activation energy in bulk p-type material of 0.2 eV, both electrical and optical properties of (Al,Ga)As diode devices can be affected by the interfacial sulfur concentrations.
Keywords
Capacitance; Conductivity; DH-HEMTs; Diodes; Electron traps; Helium; Hydrogen; P-n junctions; Substrates; Thermal resistance;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1981.25335
Filename
1481819
Link To Document