• DocumentCode
    1077041
  • Title

    High resistivity interfacial layers due to compensation by Sulfur in (Al,Ga)As devices

  • Author

    Anthony, P.J. ; Schumaker, N.E. ; Zilko, J.L.

  • Author_Institution
    Bell Laboratories, Murray Hill, NJ, USA
  • Volume
    2
  • Issue
    2
  • fYear
    1981
  • fDate
    2/1/1981 12:00:00 AM
  • Firstpage
    46
  • Lastpage
    49
  • Abstract
    In p-n junctions grown by LPE in the (Al,Ga)As system, high concentrations of Sulfur can accumulate on the p side of the junction. As a result, a closely compensated, high resistivity region can extend for 0.1-1.0 µm into the p layer. Since sulfur creates deep electron traps in Al0.4Ga0.6As with a thermal activation energy in bulk p-type material of 0.2 eV, both electrical and optical properties of (Al,Ga)As diode devices can be affected by the interfacial sulfur concentrations.
  • Keywords
    Capacitance; Conductivity; DH-HEMTs; Diodes; Electron traps; Helium; Hydrogen; P-n junctions; Substrates; Thermal resistance;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1981.25335
  • Filename
    1481819