Title :
Spatial and Phase-Resolved Optical Emission Patterns in Capacitively Coupled Radio-Frequency Plasmas
Author :
Nemschokmichal, Sebastian ; Dittmann, Kristian ; Meichsner, Jürgen
Author_Institution :
Inst. of Phys., Univ. of Greifswald, Greifswald
Abstract :
Phase-resolved optical emission spectroscopy is a powerful tool to investigate the excitation mechanisms within the radio-frequency (RF) cycle of capacitively coupled RF plasmas. In this paper, the optical emission of oxygen, hydrogen, and argon atoms is investigated over a wide range of process parameters. The spatially (axial) and temporally resolved spectroscopy reveals four prominent emission patterns.
Keywords :
argon; high-frequency discharges; hydrogen; oxygen; plasma diagnostics; plasma sheaths; time resolved spectra; Ar; H; O; argon atoms; capacitively coupled RF plasma; excitation mechanisms; hydrogen atoms; oxygen atoms; phase-resolved optical emission spectroscopy; radio-frequency cycle; spatially resolved spectroscopy; temporally resolved spectroscopy; Argon; gas discharges; hydrogen; optical spectroscopy; oxygen; plasma measurements; plasma sheaths;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.917171
