• DocumentCode
    1077186
  • Title

    Pd-MOS hydrogen and hydrocarbon sensor device

  • Author

    Poteat, T.L. ; Lalevic, B.

  • Author_Institution
    Bell Laboratories, Murray Hill, NJ
  • Volume
    2
  • Issue
    4
  • fYear
    1981
  • fDate
    4/1/1981 12:00:00 AM
  • Firstpage
    82
  • Lastpage
    84
  • Abstract
    Work function changes in palladium-gate MOS devices are observed directly with a novel circuit. Adsorption and desorption times and sensitivities of devices exposed to partial pressures of hydrogen are presented. Reaction times and sensitivities to methane and butane are also given.
  • Keywords
    Capacitance; Channel bank filters; Circuits; Gas detectors; Hydrocarbons; Hydrogen; MOS capacitors; Nickel; Silicon; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1981.25349
  • Filename
    1481833
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1077186