Title :
On the magnetic saturation analyses of a micro linear switched-reluctance motor
Author :
Liu, Cheng-Tsung ; Chiang, Tsung-Shiun
Author_Institution :
Dept. of Electr. Eng., Nat. Sun Yat-sen Univ., Kaohsiung, Taiwan
fDate :
7/1/2004 12:00:00 AM
Abstract :
To achieve low cost and high operational precisions in semiconductor fabrication industry, a new micro linear switched-reluctance motor (μLSRM) that can be integrated with the microelectromechanical system (MEMS) processing scheme has been designed and investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS being considered, magnetic saturation characteristics of the μLSRM were carefully analyzed by three-dimensional finite element analysis. Hence, the generated propulsive, normal, and guidance forces at those of the most feasible motor pole shapes and winding excitation levels can be evaluated to provide a thorough design and fabrication basis.
Keywords :
finite element analysis; magnetic fields; micromechanical devices; micromotors; microswitches; reluctance motors; electroplating process; finite element analysis; geometric constraints; magnetic saturation analyses; material property; micro linear switched; microelectromechanical system processing scheme; motor pole shapes; reluctance motor; semiconductor fabrication industry; winding excitation levels; Costs; Fabrication; Magnetic analysis; Magnetic semiconductors; Magnetic switching; Microelectromechanical systems; Micromechanical devices; Micromotors; Saturation magnetization; Textile industry; Finite element analysis; microelectromechanical system; saturation; switched-reluctance motor;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2004.830221
