Title :
Post-CMOS micromachined RF varactor with mutual-isolated large-tuning capacitor and low-voltage actuator
Author_Institution :
Chinese Acad. of Sci., Shanghai
Abstract :
A micromachined tunable capacitor is presented with the variable capacitor electrically isolated from the electrostatic actuator for flexible circuit application. Fabricated in low-resisitivity silicon wafer with CMOS-compatible processes, the device exhibits a large tuning range of 218% under 4 V driving, as well as a high Q-factor of 115 at 1 GHz and a high self-resonance frequency of 9.5 GHz.
Keywords :
CMOS integrated circuits; actuators; flexible electronics; micromachining; varactors; CMOS; electrostatic actuator; flexible circuit; low-voltage actuator; micromachined RF varactor; micromachined tunable capacitor; mutual-isolated large-tuning capacitor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20071423