• DocumentCode
    1078356
  • Title

    An MOS device for AC measurement of surface impedance with application to moisture monitoring

  • Author

    Garverick, Steven L. ; Senturia, Stephen D.

  • Author_Institution
    MIT Lincoln Laboratory, Lexington, MA
  • Volume
    29
  • Issue
    1
  • fYear
    1982
  • fDate
    1/1/1982 12:00:00 AM
  • Firstpage
    90
  • Lastpage
    94
  • Abstract
    A surface impedance measurement (SIM) device fabricated using a metal-gate n-channel depletion-mode MOS process is reported. The device serves as the basis of an ac instrumentation system for the measurement of sheet resistances as high as 1016Ω/square in the frequency range 1 Hz to 10 kHz. Results are presented illustrating the use of the device as a moisture monitor.
  • Keywords
    Electrical resistance measurement; Electrodes; Impedance measurement; MOS devices; Moisture measurement; Monitoring; Substrates; Surface impedance; Surface resistance; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1982.20663
  • Filename
    1482160
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1078356