Title :
Direct laser generation of large field high resolution thin metal film patterns
Author :
Townsend, W. ; Zaleckas, V. ; Muniz, Joao
Author_Institution :
Western Electric Company, Princeton, NJ
fDate :
9/1/1979 12:00:00 AM
Keywords :
Laser applications, materials processing; Thin-film devices; Dielectric materials; Explosives; Laser beams; Machining; Optical feedback; Optical films; Optical materials; Power lasers; Substrates; Transistors;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1979.1070204
