Title :
GaAs MESFET´s by molecular beam epitaxy
Author :
Morkoç, Hadis ; Drummond, Timothy J. ; Omori, Masahiro
Author_Institution :
University of Illinois, Urbana, IL
fDate :
2/1/1982 12:00:00 AM
Abstract :
The noise performance of "T" shaped Ti/W/Au gate GaAs Schottky-barrier field-effect transistors fabricated on channel layers grown by molecular-beam epitaxy (MBE) is reported. The nominal gate length was about 0.7 µm with a total gate width of 250 µm. Typical noise figure and the associated gain were 1.2 and 14 dB at 4 GHz, and 1.9 and 8.5 dB at 12 GHz. To out knowledge these are the best results reported to date on devices fabricated using MBE-grown GaAs. These preliminary results show the promise of MBE for high-quality GaAs FET\´s.
Keywords :
Fabrication; Gallium arsenide; Gold; MESFETs; Molecular beam epitaxial growth; Noise figure; Ohmic contacts; Semiconductor device noise; Substrates; Temperature;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1982.20688