Title :
Multiple-wavelength vertical-cavity surface-emitting laser arrays with a record wavelength span
Author :
Yuen, Wupen ; Li, Gabriel S. ; Chang-Hasnain, Connie J.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
Multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a modified patterned-substrate growth technique in a molecular beam epitaxy (MBE) system. We achieved a large lasing wavelength span of 62.7 nm and highly uniform threshold currents with an average of 2.16/spl plusmn/0.81 mA. High repeatibility of wavelength spacing between 15 arrays with sharp wavelength shift rate 117.14 nm/mm is achieved.
Keywords :
molecular beam epitaxial growth; optical fabrication; semiconductor laser arrays; surface emitting lasers; 2.16 mA; molecular beam epitaxy; multiple-wavelength vertical-cavity surface-emitting laser arrays; patterned-substrate growth; threshold currents; Fabry-Perot; Gallium arsenide; Laser modes; Optical arrays; Substrates; Surface emitting lasers; Surface waves; Temperature; Vertical cavity surface emitting lasers; Wet etching;
Journal_Title :
Photonics Technology Letters, IEEE
