A moving-slider MEMS actuator for high-bandwidth HDD tracking

Author

Hirano, Toshiki ; White, Matthew ; Yang, Henry ; Scott, Karen ; Pattanaik, Surya ; Arya, Satya ; Huang, Fu-Ying

Author_Institution

San Jose Res. Center, Hitachi Global Storage Technol. Inc., San Jose, CA, USA

Volume

40

Issue

4

fYear

2004

fDate

7/1/2004 12:00:00 AM

Firstpage

3171

Lastpage

3173

Abstract

A moving-slider microactuator for high track pitch HDDs was investigated. A new microactuator design called a bipolar microactuator that enables both high stroke and good linearity was proposed. For easier assembly, a new microactuator fabrication technique was developed that enables the bonding pads on the sidewall of the microactuator chip. The microactuator was assembled into a server-class HDD, and a servo bandwidth of 8 kHz was demonstrated with an 80-kHz sampling rate.

Keywords

disc drives; hard discs; microactuators; servomechanisms; tracking; 8 kHz; 80 kHz; bipolar microactuator; good linearity; high stroke; high track pitch HDD; high-bandwidth HDD tracking; high-bandwidth tracking servo; microactuator chip; microactuator fabrication; moving-slider MEMS actuator; moving-slider microactuator; server-class HDD; servo bandwidth; sidewall bonding pads; Actuators; Assembly; Bandwidth; Bonding; Fabrication; Linearity; Microactuators; Micromechanical devices; Sampling methods; Servomechanisms; Bipolar actuator; MEMS; high-bandwidth tracking servo; microactuator; sidewall bonding pad;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2004.829840

Filename

1325766