Title :
Fabrication of a heterodyne receiver OEIC with optimized integration process using three MOVPE growth steps only
Author :
Hamacher, M. ; Trommer, D. ; Li, K. ; Schroeter-Janßen, H. ; Rehbein, W. ; Heidrich, H.
Author_Institution :
Heinrich-Hertz-Inst. fur Nachrichtentech. Berlin GmbH, Germany
Abstract :
An optimized integration process is reported requiring only three epitaxial growth steps for the fabrication of an OEIC encompassing a single-mode laser, a waveguide element, and fast photodiodes. The process was applied to the fabrication of a heterodyne receiver including a semi-insulating buried heterostructure (SIBH)-DFB-laser with an output power of 14 mW and a side-mode suppression ratio greater than 40 dB, a 3-dB coupler, and high-speed balanced photodiodes with a bandwidth of 9 GHz. The laser can also be used as a transmitter laser exhibiting a modulation bandwidth of 11 GHz.
Keywords :
integrated optoelectronics; optical fabrication; optical receivers; vapour phase epitaxial growth; 11 GHz; 14 mW; 9 GHz; MOVPE; OEIC; coupler; epitaxial growth; fabrication; heterodyne receiver; high-speed photodiode; optimized integration; semi-insulating buried heterostructure DFB-laser; single-mode laser; waveguide; Bandwidth; Epitaxial growth; Epitaxial layers; Optical device fabrication; Optical receivers; Optical waveguides; Optoelectronic devices; Photodetectors; Photodiodes; Waveguide lasers;
Journal_Title :
Photonics Technology Letters, IEEE
