Title :
Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining
Author :
Lin, Lih Y. ; Shen, J.L. ; Lee, S.S. ; Wu, M.C. ; Sergent, A.M.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
We report on novel tunable three-dimensional solid Fabry-Perot etalons fabricated by the surface-micromachining technique. The Fabry-Perot etalon is monolithically integrated with an on-chip rotation stage for angle tuning. A wavelength tuning range of 45 nm has been achieved at 1.3 μm wavelength for a rotation angle of 70/spl deg/. The optical properties of the polysilicon materials have also been characterized using the etalon as testing vehicles.
Keywords :
Fabry-Perot interferometers; integrated optics; micromachining; optical fabrication; optical testing; tuning; 1.3 mum; Fabry-Perot etalon; Si; angle tuning; fabrication; on-chip rotation stage; optical properties; polysilicon materials; solid Fabry-Perot etalons; surface-micromachining; testing vehicles; wavelength tuning range; Bandwidth; Fabry-Perot; Mirrors; Optical fiber filters; Optical filters; Optical surface waves; Optical tuning; Solids; Vehicles; Wavelength division multiplexing;
Journal_Title :
Photonics Technology Letters, IEEE
