Title :
Laser chemical vapor deposition of metals and insulators
Author_Institution :
University of Southern California, Los Angeles, CA
fDate :
9/1/1979 12:00:00 AM
Keywords :
Insulators; Laser chemistry applications; Metals; Chemical lasers; Chemical vapor deposition; Insulation; Laser noise; Metal-insulator structures; Optical films; Pulsed laser deposition; Semiconductor films; Semiconductor lasers; Substrates;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1979.1070307
