Title :
Dislocation density and sheet resistance variations across semi-insulating GaAs wafers
Author :
Blunt, Roy T. ; Clark, Stephen ; Stirland, D.J. ; Stirland, Derek J.
Author_Institution :
Plessey Research Limited, Caswell, England
fDate :
7/1/1982 12:00:00 AM
Abstract :
Dislocation densities and sheet resistances have been measured across
Keywords :
Conductivity; Density measurement; Electrical resistance measurement; Electron traps; Epitaxial growth; Etching; Gallium arsenide; Ion implantation; Manufacturing; Substrates;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1982.20831
