• DocumentCode
    1080137
  • Title

    Compensation mechanism in liquid encapsulated Czochralski GaAs: Importance of melt stoichiometry

  • Author

    Holmes, D.E. ; Chen, R.T. ; Elliott, Kenneth R. ; Kirkpatrick, C.G. ; Yu, Phil Won

  • Author_Institution
    Rockwell International, Thousand Oaks, CA
  • Volume
    29
  • Issue
    7
  • fYear
    1982
  • fDate
    7/1/1982 12:00:00 AM
  • Firstpage
    1045
  • Lastpage
    1051
  • Abstract
    It is shown that the key to reproducible growth of undoped semi-insulating GaAs by the liquid encapsulated Czochralski (LEC) technique is the control over the melt stoichiometry. Twelve crystals were grown from stoichiometric and nonstoichiometric melts. The material was characterized by secondary ion mass spectrometry, localized vibrational mode far infrared spectroscopy, Hall-effect measurements, optical absorption, and photoluminescence. A quantitative model for the Compensation mechanism in the semi-insulating material was developed based on these measurements. The free carrier concentration is controlled by the balance between EL2 deep donors and carbon acceptors; furthermore, the incorporation of EL2 is controlled by the melt stoichiometry, increasing as the As atom fraction in the melt increases. As a result, semi-insulating material can be grown only from melts above a critical As composition. The practical significance of these results is discussed in terms of achieving high yield and reproduciblity in the crystal growth process.
  • Keywords
    Crystalline materials; Crystals; Electromagnetic wave absorption; Gallium arsenide; Infrared spectra; Mass spectroscopy; Optical materials; Particle beam optics; Semiconductor materials; Vibration measurement;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1982.20832
  • Filename
    1482329