• DocumentCode
    1080314
  • Title

    A physical mechanism of current-induced resistance decrease in heavily doped polysilicon resistors

  • Author

    Kato, Kotaro ; Ono, Terukazu ; Amemiya, Yoshihito

  • Author_Institution
    Nippon Telegraph and Telephone Public Corporation, Tokyo, Japan
  • Volume
    29
  • Issue
    8
  • fYear
    1982
  • fDate
    8/1/1982 12:00:00 AM
  • Firstpage
    1156
  • Lastpage
    1161
  • Abstract
    A physical model describing the basic mechanism of the current-induced resistance decrease in heavily doped polysilicon resistors´ experimental aspects reported in the previous paper [1], is proposed. The resistance decrease is explained in terms of the local melting of boundary layers between crystal grains in the polysilicon caused by the current feeding and a segregation of impurity atoms in the subsequent solidification process. This model explains all the experimental results concerning the resistance decrease phenomena. The theoretical expression for the current dependence of resistance decrease derived from the model agrees well with the experimental characteristics.
  • Keywords
    Analog integrated circuits; Atomic layer deposition; Current density; Doping; Electrodes; Impurities; Resistors; Silicon; Surface resistance; Thermal resistance;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1982.20850
  • Filename
    1482347