DocumentCode
1080314
Title
A physical mechanism of current-induced resistance decrease in heavily doped polysilicon resistors
Author
Kato, Kotaro ; Ono, Terukazu ; Amemiya, Yoshihito
Author_Institution
Nippon Telegraph and Telephone Public Corporation, Tokyo, Japan
Volume
29
Issue
8
fYear
1982
fDate
8/1/1982 12:00:00 AM
Firstpage
1156
Lastpage
1161
Abstract
A physical model describing the basic mechanism of the current-induced resistance decrease in heavily doped polysilicon resistors´ experimental aspects reported in the previous paper [1], is proposed. The resistance decrease is explained in terms of the local melting of boundary layers between crystal grains in the polysilicon caused by the current feeding and a segregation of impurity atoms in the subsequent solidification process. This model explains all the experimental results concerning the resistance decrease phenomena. The theoretical expression for the current dependence of resistance decrease derived from the model agrees well with the experimental characteristics.
Keywords
Analog integrated circuits; Atomic layer deposition; Current density; Doping; Electrodes; Impurities; Resistors; Silicon; Surface resistance; Thermal resistance;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1982.20850
Filename
1482347
Link To Document