DocumentCode
1080411
Title
Selfaligned InGaAs/InP heterostructure bipolar transistors
Author
Feygenson, A. ; Temkin, H. ; Tsang, W.T. ; Yang, L. ; Yadvish, R.D. ; Scortino, P.F.
Author_Institution
AT&T Bell Labs., Murray Hill, NJ, USA
Volume
27
Issue
13
fYear
1991
fDate
6/20/1991 12:00:00 AM
Firstpage
1116
Lastpage
1118
Abstract
InGaAs/InP heterostructure bipolar transistors have been realised using a new selfaligned process. Transistor wafers were grown by chemical beam epitaxy. Ideality factors close to unity were measured for emitter-base and collector-base diodes. The resulting devices exhibit nearly constant gain over four orders of magnitude of collector current densities, from j=1.5*10-4 A/cm2 to 1.5 A/cm2.
Keywords
III-V semiconductors; gallium arsenide; heterojunction bipolar transistors; indium compounds; CBE; HBT; InGaAs-InP; chemical beam epitaxy; device fabrication; heterostructure bipolar transistors; selfaligned process;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19910697
Filename
132699
Link To Document