MEMS-Based Electronically Steerable Antenna Array Fabricated Using PCB Technology

In this paper, a MEMS-based electronically steerable antenna array (ESA) fabricated using printed circuit processing techniques is reported. A Kapton polyimide film is used as the structural layer for fabricating MEMS varactors. The MEMS varactors have been used in the bistable mode to design loaded- line-type MEMS phase shifters. These MEMS phase shifters have been monolithically integrated with the ESA on a Duroid substrate using printed circuit processing techniques. For proof-of-concept demonstration of the proposed MEMS-based ESA, a 3-bit MEMS phase shifter has been monolithically integrated with a two- element double-folded slot-antenna array on a Duroid substrate. An X-band ESA prototype with a beam steering angle of 20deg at 9.1 GHz is presented.