• DocumentCode
    1081308
  • Title

    Plans for Next-Gen Chips Imperiled

  • Author

    Santo, Brain

  • Volume
    44
  • Issue
    8
  • fYear
    2007
  • Firstpage
    12
  • Lastpage
    14
  • Abstract
    In chip industry, a technique called extreme ultraviolet (EUV) photolithography would be ready to start churning out cutting-edge logic chips. Today´s technology uses light with a wavelength of 193 nanometers to produce chips with key parts, or features, that measure just 65 nm.
  • Keywords
    integrated circuit technology; integrated logic circuits; nanolithography; photoresists; ultraviolet lithography; EUV technique; chip industry; extreme ultraviolet photolithography; logic chips; photoresist; size 65 nm; wavelength 193 nm; Circuits; Etching; Length measurement; Lithography; Logic; Microprocessors; Photonics Society; Resists; Roads; Ultraviolet sources;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.2007.4283527
  • Filename
    4283527
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1081308