Title :
IIB-1 a high quantum efficiency backside illuminated AlGaAs/GaAs imaging CCD
Author :
Liu, Y.Z. ; Sovero, E.A. ; Martin, E.H. ; Anderson, R.J.
fDate :
10/1/1982 12:00:00 AM
Keywords :
Bonding; Cathodes; Charge coupled devices; FETs; Fabrication; Gallium arsenide; Glass; Optical devices; Optical imaging; Temperature;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1982.20945
