IIB-1 a high quantum efficiency backside illuminated AlGaAs/GaAs imaging CCD

Author

Liu, Y.Z. ; Sovero, E.A. ; Martin, E.H. ; Anderson, R.J.

Volume

Issue

fYear

1982

fDate

10/1/1982 12:00:00 AM

Firstpage

1666

Lastpage

1667

Keywords

Bonding; Cathodes; Charge coupled devices; FETs; Fabrication; Gallium arsenide; Glass; Optical devices; Optical imaging; Temperature;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

DOI

10.1109/T-ED.1982.20945

Filename

1482442

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